Integrated Circuits of Patterning Aluminum by Plasma Etching and Patterning of Copper by Damascene Plating


Very- large-scale integration (VLSI) of integrated circuits (ICs) is the combination of thousands of transistors on a single piece of silicon wafer. Metallic interconnects from one transistor to another on the silicon wafer make VLSI possible. Plasma etching is a process in which the plasma (a relative ion beam) generates volatile etch products on unmasked blue material (see figure 1). Here the blue material can be sputter deposited aluminum but not copper because copper dose not from volatile species with a plasma (cannot be etched this way). Plated copper is desired instead of sputter deposited aluminum because the copper is a better electronic conductor than the aluminum. Using a copper instead of aluminum interconnect results in an equivalent but smaller IC because there is less resistive heating with the copper. 


Copper patterning is done by Damascene plating (see Fig. 2) in which the underlying silicon layer is patterned by plasma etching forming open trenches in the silicon where a thick coating of copper is plated and overfills the trenches on the silicon. The overfill is removed by chemical-mechanical planarization (CMP) leaving an electronically conducting copper line inside the silicon which can act as an interconnect.


Which figure shows metal inlaying?

  1. Figure 1
  2. Figure 2
  3. Both figure 1 and figure 2
  4. Neither figure 1 or Figure 2


This question belongs to physics and discusses about integrated circuits of patterning aluminum by plasma etching and patterning of copper by damascene plating.

Total word count: 96


Download Full Solution


  • HWA

    this is a very good website

  • HWA

    I have 50 questions for the same test your page is showing only 28

  • HWA

    hi can you please help or guide me to answer my assignments. thanks

  • HWA

    hi can anyone help or guide me to my assignments. thanks

  • HWA

  • HWA

    This solution is perfect ...thanks

  • HWA

    Hello Allison,I love the 2nd image that you did! I also, had never heard of SumoPaint, is something that I will have to exolpre a bit! I understand completely the 52 (or so) youtube videos that you probably watched. Sometimes they have what you want, sometimes they don't! However, it is always satisfying when you are able to produce something that you have taught yourself. Great job!Debra 0 likes

  • HWA

    Perfect bank of solution. 

  • HWA

    great !

  • HWA
    Paul Brandon-Fritzius

    thanks for the quick response. the solution looks good. :)

  • HWA
    tina Johnson

    thnx for the answer. it was perfect. just the way i wanted it. 

  • HWA

    works fine.